The high tech. industries in the region of Great China including Taiwan and Mainland, such as manufacturing of Semiconductor; DRAM (Memory Chips); Solar Cell and TFT LCD, the production capacity has been increased dramatically due to recent breakthrough of process technology and tools development. Lots of new billions US dollars invested 12” wafer Fab. and 8^th to 10^th generation of TFT LCD panel factories for large size of LCD TV, have been built in Great China during the past five years. In order to secure stable and safe production from huge financial loss due to the unexpected interruption of power supply, such as power dip and power outage of normal power supply during production, there are great numbers of large capacity of Gensets and Dynamic UPS driven by diesel engines have been installed in each factory as a safe guard of the production.

The back up power supply system includes Gensets and Dynamic UPS, that will generate toxic exhaust from diesel engine, whenever normal power supply being interrupted and diesel engine being started. The toxic engine exhaust contains large amount of : Particulate; Hydrocarbon; Carbon Monoxide and NOx, which are not only violating EPA regulations in every country, but also is the major threats to the operation of clean room of every high tech. factory of above industries.